Granted Patent
Utility
US 6,195,246 · App. 09/281,399
Electrostatic chuck having replaceable dielectric cover
Inventors:
William R. Livesay, David M. Rose, Richard L. Ross
Patented Case
View Patent ↗
Granted: Feb 27, 2001
Filed: Mar 30, 1999
Inventors
William R. Livesay
David M. Rose
Richard L. Ross
Assignee (at issue)
Electron Vision Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.