Granted Patent
Utility
US 6,195,378 · App. 09/143,040
Twisted blade tangential fan for excimer laser
Inventor:
Thomas Hofmann
Patented Case
View Patent ↗
Granted: Feb 27, 2001
Filed: Aug 28, 1998
Inventor
Thomas Hofmann
Assignee (at issue)
Cymer, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.