IP Library › Granted Patent US 6,196,061
Granted Patent Utility
US 6,196,061 · App. 09/186,742

AFM with referenced or differential height measurement

Inventors: Dennis M. Adderton, Stephen C. Minne
Patented Case View Patent ↗
Granted: Mar 6, 2001 Filed: Nov 5, 1998
Inventors
Dennis M. Adderton
Stephen C. Minne
Assignee (at issue)
NanoDevices, Inc.

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Quick Facts
Patent No.
US 6,196,061
App. No.
09/186,742
Filed
1998-11-05
Granted
2001-03-06
Kind
A