Granted Patent
Utility
US 6,198,128 · App. 09/390,662
Method of manufacturing a semiconductor device, and semiconductor device
Inventors:
Hisao Asakura, Yoshitaka Tadaki, Toshihiro Sekiguchi, Ryo Nagai, Masafumi Miyamoto, Masayuki Nakamura, Shinichi Miyatake, Tsuyuki Suzuki, Masahiro Hyoma
Patented Case
View Patent ↗
Granted: Mar 6, 2001
Filed: Sep 7, 1999
Inventors
Hisao Asakura
Yoshitaka Tadaki
Toshihiro Sekiguchi
Ryo Nagai
Masafumi Miyamoto
Masayuki Nakamura
Shinichi Miyatake
Tsuyuki Suzuki
Masahiro Hyoma
Assignees (at issue)
HITACHI, LTD.
Hitachi Ulsi Systems Co., Ltd.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.