Granted Patent
Utility
US 6,198,144 · App. 09/376,232
Passivation of sidewalls of a word line stack
Inventors:
Pai-Hung Pan, Martin C. Roberts, Gurtei Sandhu, Weimin Li, Christopher W. Hill, Vishnu K. Agarwal
Patented Case
View Patent ↗
Granted: Mar 6, 2001
Filed: Aug 18, 1999
Inventors
Pai-Hung Pan
Martin C. Roberts
Gurtei Sandhu
Weimin Li
Christopher W. Hill
Vishnu K. Agarwal
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.