IP Library › Granted Patent US 6,200,389
Granted Patent Utility
US 6,200,389 · App. 09/113,823

Single body injector and deposition chamber

Inventors: Adam Q. Miller, Daniel Dobkin
Patented Case View Patent ↗
Granted: Mar 13, 2001 Filed: Jul 10, 1998
Inventors
Adam Q. Miller
Daniel Dobkin
Assignee (at issue)
Silicon Valley Group, Thermal Systems LLP

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Quick Facts
Patent No.
US 6,200,389
App. No.
09/113,823
Filed
1998-07-10
Granted
2001-03-13
Kind
A