Granted Patent
Utility
US 6,200,389 · App. 09/113,823
Single body injector and deposition chamber
Inventors:
Adam Q. Miller, Daniel Dobkin
Patented Case
View Patent ↗
Granted: Mar 13, 2001
Filed: Jul 10, 1998
Inventors
Adam Q. Miller
Daniel Dobkin
Assignee (at issue)
Silicon Valley Group, Thermal Systems LLP
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.