Granted Patent
Utility
US 6,211,126 · App. 09/331,537
Formulations including a 1, 3-dicarbonyl compound chelating agent for stripping residues from semiconductor substrates
Inventors:
William A. Wojtczak, George Guan, Stephen A. Fine
Patented Case
View Patent ↗
Granted: Apr 3, 2001
Filed: Aug 20, 1999
Inventors
William A. Wojtczak
George Guan
Stephen A. Fine
Assignee (at issue)
ADVANCED TECHNOLOGY & MATERIALS CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.