Granted Patent
Utility
US 6,212,211 · App. 09/169,195
Shock wave dissipating laser chamber
Inventors:
James H. Azzola, Paul R. Marsden, Richard C. Ujazdowski
Patented Case
View Patent ↗
Granted: Apr 3, 2001
Filed: Oct 9, 1998
Inventors
James H. Azzola
Paul R. Marsden
Richard C. Ujazdowski
Assignee (at issue)
Cymer, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.