Granted Patent
Utility
US 6,212,214 · App. 09/379,034
Performance control system and method for gas discharge lasers
Inventors:
Klaus Vogler, Peter Heist
Patented Case
View Patent ↗
Granted: Apr 3, 2001
Filed: Aug 23, 1999
Inventors
Klaus Vogler
Peter Heist
Assignee (at issue)
Lambda Physik AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.