Granted Patent
Utility
US 6,214,496 · App. 09/280,615
Method for reducing corner rounding in mask fabrication utilizing elliptical energy beam
Inventors:
Enio Luiz Carpio, Wolfgang Besenböck
Patented Case
View Patent ↗
Granted: Apr 10, 2001
Filed: Mar 29, 1999
Inventors
Enio Luiz Carpio
Wolfgang Besenböck
Assignee (at issue)
Infineon Technologies North America Corp.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.