Granted Patent
Utility
US 6,214,661 · App. 09/489,771
Method to prevent oxygen out-diffusion from BSTO containing micro-electronic device
Inventors:
Heon Jeong LEE, Young Jin Park, Young Limb, Brian Lee, Kilho Lee, Satish D. Athavale, Jai-Hoon Sim
Patented Case
View Patent ↗
Granted: Apr 10, 2001
Filed: Jan 21, 2000
Inventors
Heon Jeong LEE
Young Jin Park
Young Limb
Brian Lee
Kilho Lee
Satish D. Athavale
Jai-Hoon Sim
Assignees (at issue)
Infineon Technologies North America Corp.
International Business Machines Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.