Granted Patent
Utility
US 6,224,785 · App. 08/924,021
Aqueous ammonium fluoride and amine containing compositions for cleaning inorganic residues on semiconductor substrates
Inventors:
William A. Wojtczak, George Guan, Daniel Fine, Stephen A. Fine
Patented Case
View Patent ↗
Granted: May 1, 2001
Filed: Aug 29, 1997
Inventors
William A. Wojtczak
George Guan
Daniel Fine
Stephen A. Fine
Assignee (at issue)
ADVANCED TECHNOLOGY & MATERIALS CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.