Granted Patent
Utility
US 6,224,948 · App. 08/939,594
Plasma enhanced chemical deposition with low vapor pressure compounds
Inventor:
John D. Affinito
Patented Case
View Patent ↗
Granted: May 1, 2001
Filed: Sep 29, 1997
Inventor
John D. Affinito
Assignee (at issue)
Battelle Memorial Institute
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.