Granted Patent
Utility
US 6,238,981 · App. 09/307,879
Process for forming MOS-gated devices having self-aligned trenches
Inventor:
Thomas E. Grebs
Patented Case
View Patent ↗
Granted: May 29, 2001
Filed: May 10, 1999
Inventor
Thomas E. Grebs
Assignee (at issue)
Intersil Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.