Granted Patent
Utility
US 6,241,818 · App. 09/287,916
Method and system of controlling taper growth in a semiconductor crystal growth process
Inventors:
Steven L. Kimbel, Robert R. Wyand, III
Patented Case
View Patent ↗
Granted: Jun 5, 2001
Filed: Apr 7, 1999
Inventors
Steven L. Kimbel
Robert R. Wyand, III
Assignee (at issue)
MEMC Electronic Materials, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.