Granted Patent
Utility
US 6,242,718 · App. 09/434,030
Wafer holder
Inventors:
Armand P. Ferro, Ivo Raaijmakers, Ravinder Aggarwal, Ronald R. Stevens
Patented Case
View Patent ↗
Granted: Jun 5, 2001
Filed: Nov 4, 1999
Inventors
Armand P. Ferro
Ivo Raaijmakers
Ravinder Aggarwal
Ronald R. Stevens
Assignee (at issue)
ASM America, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.