Granted Patent
Utility
US 6,243,405 · App. 09/484,818
Very stable excimer or molecular fluorine laser
Inventors:
Stefan Borneis, Klaus Brunwinkel, Uwe Stamm, Frank Voss
Patented Case
View Patent ↗
Granted: Jun 5, 2001
Filed: Jan 18, 2000
Inventors
Stefan Borneis
Klaus Brunwinkel
Uwe Stamm
Frank Voss
Assignee (at issue)
Lambda Physik AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.