Granted Patent
Utility
US 6,251,720 · App. 08/720,375
High pressure reoxidation/anneal of high dielectric constant materials
Inventors:
Randhir P. S. Thakur, Scott DeBoer
Patented Case
View Patent ↗
Granted: Jun 26, 2001
Filed: Sep 27, 1996
Inventors
Randhir P. S. Thakur
Scott DeBoer
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.