Granted Patent
Utility
US 6,251,743 · App. 09/071,991
Method of liquid treatment of microstructures comprising bendable structural members
Inventors:
Motoo Nakano, Hiroshi Nomura, Masaya Katayama, Toshimi Ikeda, Fumihiko Inoue, Junichi Ishikawa, Masahiro Kuwamura
Patented Case
View Patent ↗
Granted: Jun 26, 2001
Filed: May 5, 1998
Inventors
Motoo Nakano
Hiroshi Nomura
Masaya Katayama
Toshimi Ikeda
Fumihiko Inoue
Junichi Ishikawa
Masahiro Kuwamura
Assignees (at issue)
Fujitsu Limited
Fujitsu VLSI Limited
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.