Granted Patent
Utility
US 6,259,513 · App. 08/799,107
Illumination system with spatially controllable partial coherence
Inventors:
Gregg M. Gallatin, Andrew W. McCullough
Patented Case
View Patent ↗
Granted: Jul 10, 2001
Filed: Feb 11, 1997
Inventors
Gregg M. Gallatin
Andrew W. McCullough
Assignee (at issue)
SVG Lithography Systems, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.