Granted Patent
Utility
US 6,261,163 · App. 09/385,985
Web-format planarizing machines and methods for planarizing microelectronic substrate assemblies
Inventors:
Michael A. Walker, Scott E. Moore
Patented Case
View Patent ↗
Granted: Jul 17, 2001
Filed: Aug 30, 1999
Inventors
Michael A. Walker
Scott E. Moore
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.