Granted Patent
Utility
US 6,261,357 · App. 09/155,234
Coating liquid for forming low-permittivity silica film and substrate having low-permittivity coating film
Inventors:
Miki Egami, Akira Nakashima, Michio Komatsu
Patented Case
View Patent ↗
Granted: Jul 17, 2001
Filed: Sep 23, 1998
Inventors
Miki Egami
Akira Nakashima
Michio Komatsu
Assignees (at issue)
CATALYSTS & CHEMICALS INDUSTRIES CO., LTD.
Fujitsu Limited
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.