Granted Patent
Utility
US 6,261,924 · App. 09/489,865
Maskless process for self-aligned contacts
Inventors:
Jack A. Mandelman, Heon Lee, Young Jin Park
Patented Case
View Patent ↗
Granted: Jul 17, 2001
Filed: Jan 21, 2000
Inventors
Jack A. Mandelman
Heon Lee
Young Jin Park
Assignees (at issue)
Infineon Technologies AG
International Business Machines Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.