Granted Patent
Utility
US 6,261,962 · App. 08/904,954
Method of surface treatment of semiconductor substrates
Inventors:
Jyoti Kiron Bhardwaj, Huma Ashraf, Babak Khamsehpour, Janet Hopkins, Alan Michael Hynes, Martin Edward Ryan, David Mark Haynes
Patented Case
View Patent ↗
Granted: Jul 17, 2001
Filed: Aug 1, 1997
Inventors
Jyoti Kiron Bhardwaj
Huma Ashraf
Babak Khamsehpour
Janet Hopkins
Alan Michael Hynes
Martin Edward Ryan
David Mark Haynes
Assignee (at issue)
Surface Technology Systems Limited
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.