Granted Patent
Utility
US 6,267,605 · App. 09/440,446
Self positioning, passive MEMS mirror structures
Inventor:
David K. Biegelsen
Patented Case
View Patent ↗
Granted: Jul 31, 2001
Filed: Nov 15, 1999
Inventor
David K. Biegelsen
Assignee (at issue)
Xerox Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.