Granted Patent
Utility
US 6,267,827 · App. 09/266,259
Ni-Fe alloy sputtering target for forming magnetic thin films, magnetic thin film, and method of manufacturing the Ni-Fe alloy sputtering target
Inventors:
Yuichiro Shindo, Tsuneo Suzuki
Patented Case
View Patent ↗
Granted: Jul 31, 2001
Filed: Mar 11, 1999
Inventors
Yuichiro Shindo
Tsuneo Suzuki
Assignee (at issue)
Japan Energy Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.