Granted Patent
Utility
US 6,268,994 · App. 09/350,726
Electrostatic chuck and method of manufacture
Inventors:
Joseph S. Logan, Robert E. Tompkins, John R. Miller
Patented Case
View Patent ↗
Granted: Jul 31, 2001
Filed: Jul 9, 1999
Inventors
Joseph S. Logan
Robert E. Tompkins
John R. Miller
Assignee (at issue)
Dorsey Gage Co., Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.