Granted Patent
Utility
US 6,271,557 · App. 09/412,481
Center node for deep trench capacitors
Inventors:
Ulrich Zimmermann, Thomas Achammer
Patented Case
View Patent ↗
Granted: Aug 7, 2001
Filed: Oct 5, 1999
Inventors
Ulrich Zimmermann
Thomas Achammer
Assignee (at issue)
Infineon Technologies AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.