Granted Patent
Utility
US 6,278,116 · App. 09/370,773
Method of monitoring deep ultraviolet exposure system
Inventor:
Cheng-Kuan Wu
Patented Case
View Patent ↗
Granted: Aug 21, 2001
Filed: Aug 9, 1999
Inventor
Cheng-Kuan Wu
Assignee (at issue)
WINBOND ELECTRONICS CORP.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.