Granted Patent
Utility
US 6,290,864 · App. 09/427,841
Fluoride gas etching of silicon with improved selectivity
Inventors:
Satyadev Patel, Gregory P. Schaadt, Douglas B. MacDonald
Patented Case
View Patent ↗
Granted: Sep 18, 2001
Filed: Oct 26, 1999
Inventors
Satyadev Patel
Gregory P. Schaadt
Douglas B. MacDonald
Assignee (at issue)
Reflectivity, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.