Granted Patent
Utility
US 6,291,112 · App. 09/191,762
Method of automatically forming a rim phase shifting mask
Inventors:
Chin-Lung Lin, Yao-Ching Ku
Patented Case
View Patent ↗
Granted: Sep 18, 2001
Filed: Nov 13, 1998
Inventors
Chin-Lung Lin
Yao-Ching Ku
Assignee (at issue)
WINBOND ELECTRONICS CORP.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.