Granted Patent
Utility
US 6,291,118 · App. 09/480,266
Elimination of proximity effect in photoresist
Inventors:
Tsai-Sheng Gau, Chang-Ming Dai
Patented Case
View Patent ↗
Granted: Sep 18, 2001
Filed: Jan 11, 2000
Inventors
Tsai-Sheng Gau
Chang-Ming Dai
Assignee (at issue)
Industrial Technology Research Institute
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.