Granted Patent
Utility
US 6,291,938 · App. 09/490,696
Methods and apparatus for igniting and sustaining inductively coupled plasma
Inventors:
Russell F. Jewett, Curtis Charles Camus
Patented Case
View Patent ↗
Granted: Sep 18, 2001
Filed: Jan 24, 2000
Inventors
Russell F. Jewett
Curtis Charles Camus
Assignee (at issue)
Litmas, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.