IP Library › Granted Patent US 6,295,130
Granted Patent Utility
US 6,295,130 · App. 09/469,892

Structure and method for a microelectromechanically tunable fabry-perot cavity spectrophotometer

Inventors: Decai Sun, Joel A. Kubby, Alex T. Tran, Eric Peeters
Patented Case View Patent ↗
Granted: Sep 25, 2001 Filed: Dec 22, 1999
Inventors
Decai Sun
Joel A. Kubby
Alex T. Tran
Eric Peeters
Assignee (at issue)
Xerox Corporation

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Quick Facts
Patent No.
US 6,295,130
App. No.
09/469,892
Filed
1999-12-22
Granted
2001-09-25
Kind
A