Granted Patent
Utility
US 6,295,861 · App. 09/238,852
Quartz crystal microbalance sensors and semiconductor manufacturing process systems comprising same
Inventors:
Glenn M. Tom, Mackenzie King
Patented Case
View Patent ↗
Granted: Oct 2, 2001
Filed: Jan 28, 1999
Inventors
Glenn M. Tom
Mackenzie King
Assignee (at issue)
ADVANCED TECHNOLOGY & MATERIALS CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.