Granted Patent
Utility
US 6,296,714 · App. 09/004,199
Washing solution of semiconductor substrate and washing method using the same
Inventors:
Chizuko Matsuo, Mikio Kishimoto, Kazushige Takaishi
Patented Case
View Patent ↗
Granted: Oct 2, 2001
Filed: Jan 8, 1998
Inventors
Chizuko Matsuo
Mikio Kishimoto
Kazushige Takaishi
Assignees (at issue)
Mitsubishi Materials Silicon Corp.
MITSUBISHI MATERIALS CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.