Granted Patent
Utility
US 6,297,173 · App. 09/383,238
Process for forming a semiconductor device
Inventors:
Philip J. Tobin, Rama I. Hegde, Hsing-Huang Tseng, David L. O'Meara, Victor Wang
Patented Case
View Patent ↗
Granted: Oct 2, 2001
Filed: Aug 26, 1999
Inventors
Philip J. Tobin
Rama I. Hegde
Hsing-Huang Tseng
David L. O'Meara
Victor Wang
Assignee (at issue)
Motorola, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.