Granted Patent
Utility
US 6,297,594 · App. 09/495,455
Plasma source ion implanting apparatus using the same
Inventors:
Shigeki Sakai, Masato Takahashi
Patented Case
View Patent ↗
Granted: Oct 2, 2001
Filed: Feb 1, 2000
Inventors
Shigeki Sakai
Masato Takahashi
Assignee (at issue)
NISSIN ELECTRIC CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.