Granted Patent
Utility
US 6,298,080 · App. 09/452,353
Narrow band excimer or molecular fluorine laser with adjustable bandwidth
Inventors:
Peter Heist, Jürgen Kleinschmidt
Patented Case
View Patent ↗
Granted: Oct 2, 2001
Filed: Dec 1, 1999
Inventors
Peter Heist
Jürgen Kleinschmidt
Assignee (at issue)
Lambda Physik AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.