IP Library › Granted Patent US 6,299,514
Granted Patent Utility
US 6,299,514 · App. 09/523,115

Double-disk polishing machine, particularly for tooling semiconductor wafers

Inventor: Hans-Peter Boller
Patented Case View Patent ↗
Granted: Oct 9, 2001 Filed: Mar 10, 2000
Inventor
Hans-Peter Boller
Assignee (at issue)
Peter Wolters Werkzeugmaschinen GmbH

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Quick Facts
Patent No.
US 6,299,514
App. No.
09/523,115
Filed
2000-03-10
Granted
2001-10-09
Kind
A