Granted Patent
Utility
US 6,303,524 · App. 09/789,062
High temperature short time curing of low dielectric constant materials using rapid thermal processing techniques
Inventors:
Rahul Sharangpani, Sing-Pin Tay
Patented Case
View Patent ↗
Granted: Oct 16, 2001
Filed: Feb 20, 2001
Inventors
Rahul Sharangpani
Sing-Pin Tay
Assignee (at issue)
Mattson Thermal Products GmbH
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.