Granted Patent
Utility
US 6,312,854 · App. 09/270,052
"Method of patterning sub-0.25 lambda line features with high transmission, ""attenuated"" phase shift masks"
Inventors:
J. Fung Chen, Roger Caldwell, Tom Laidig, Kurt E. Wampler
Patented Case
View Patent ↗
Granted: Nov 6, 2001
Filed: Mar 16, 1999
Inventors
J. Fung Chen
Roger Caldwell
Tom Laidig
Kurt E. Wampler
Assignee (at issue)
ASML Masktools Netherlands B.V.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.