IP Library Granted Patent US 6,313,474
Granted Patent Utility
US 6,313,474 · App. 09/357,938

Method for measuring distribution of beams of charged particles and methods relating thereto

Inventors: Koji Iwasawa, Nobuo Nagai
Patented Case View Patent ↗
Granted: Nov 6, 2001 Filed: Jul 21, 1999
Inventors
Koji Iwasawa
Nobuo Nagai
Assignee (at issue)
NISSIN ELECTRIC CO., LTD.

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Quick Facts
Patent No.
US 6,313,474
App. No.
09/357,938
Filed
1999-07-21
Granted
2001-11-06
Kind
A