Granted Patent
Utility
US 6,315,641 · App. 09/509,334
Method and apparatus for chemical mechanical polishing
Inventors:
Kyu Hong Lee, Yong Byouk Lee, Sang Won Kang
Patented Case
View Patent ↗
Granted: Nov 13, 2001
Filed: Mar 24, 2000
Inventors
Kyu Hong Lee
Yong Byouk Lee
Sang Won Kang
Assignees (at issue)
Semicontect Corp
GENITECH, INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.