Granted Patent
Utility
US 6,316,367 · App. 09/537,705
Process and device for handling disk-like objects, especially silicon wafers
Inventor:
Franz Sumnitsch
Patented Case
View Patent ↗
Granted: Nov 13, 2001
Filed: Mar 30, 2000
Inventor
Franz Sumnitsch
Assignee (at issue)
SEZ Semiconductor-Equipment Zubehor
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.