Granted Patent
Utility
US 6,319,735 · App. 09/452,341
Photoresist dispense method by compensation for substrate reflectivity
Inventor:
Daniel C. Baker
Patented Case
View Patent ↗
Granted: Nov 20, 2001
Filed: Nov 30, 1999
Inventor
Daniel C. Baker
Assignee (at issue)
Philips Semiconductors
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.