Granted Patent
Utility
US 6,323,081 · App. 09/146,866
Diffusion barrier layers and methods of forming same
Inventor:
Eugene P. Marsh
Patented Case
View Patent ↗
Granted: Nov 27, 2001
Filed: Sep 3, 1998
Inventor
Eugene P. Marsh
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.