Granted Patent
Utility
US 6,323,103 · App. 09/175,267
Method for fabricating transistors
Inventors:
Rajesh Rengarajan, Jochen Beintner, Ulrike Gruening, Hans-Oliver Joachim
Patented Case
View Patent ↗
Granted: Nov 27, 2001
Filed: Oct 20, 1998
Inventors
Rajesh Rengarajan
Jochen Beintner
Ulrike Gruening
Hans-Oliver Joachim
Assignee (at issue)
Siemens Aktiengesellschaft
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.