Granted Patent
Utility
US 6,328,846 · App. 09/484,873
Device for an etch treatment of a disk-like object
Inventors:
Kurt Langen, Philip Engesser
Patented Case
View Patent ↗
Granted: Dec 11, 2001
Filed: Jan 18, 2000
Inventors
Kurt Langen
Philip Engesser
Assignee (at issue)
SEZ Semiconductor-Equipment Zubehor fur die Halbleiterfertigung AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.