Granted Patent
Utility
US 6,332,568 · App. 09/761,359
Wafer scale micromachine assembly method
Inventor:
Todd R. Christenson
Patented Case
View Patent ↗
Granted: Dec 25, 2001
Filed: Jan 16, 2001
Inventor
Todd R. Christenson
Assignee (at issue)
Sandia Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.